A Cambridge Instruments Stereoscan 90 SEM (Fig. B.4) with 4-inch wafer capability is available in the clean room.
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Figure B.4. Stereoscan SEM. The Cambridge Instruments Stereoscan 90 SEM has 4-inch wafer capability. |
A Cambridge Instruments Stereoscan 90 SEM (Fig. B.4) with 4-inch wafer capability is available in the clean room.
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Figure B.4. Stereoscan SEM. The Cambridge Instruments Stereoscan 90 SEM has 4-inch wafer capability. |